Example 4 Molding micropatterned elements
1) Line & Space
Mold: Amorphous carbon
(Offered by: NTT-AT Nanofabrication Corp.)
Molding machine: GMP-207 HV
Imprinted material: Quartz glass
Molding temperature: 1400°C
Mold: Amorphous carbon
(Offered by: NTT-AT Nanofabrication Corp.)
Molding machine: GMP-207 HV
Imprinted material: Quartz glass
Molding temperature: 1400°C